Invention Grant
- Patent Title: Edge inspection apparatus
- Patent Title (中): 边缘检查装置
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Application No.: US12292010Application Date: 2008-11-10
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Publication No.: US07800748B2Publication Date: 2010-09-21
- Inventor: Naoshi Sakaguchi
- Applicant: Naoshi Sakaguchi
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2006-129894 20060509; JP2006-129895 20060509
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
An edge inspection apparatus includes: an illumination means 5 that illuminates an edge of a flat subject with diffused light from a position other than directly above or directly below a surface or a reverse surface of the subject; an imaging means 4 that takes an image of the edge from a position in a direction perpendicular to a plane parallel to the surface or the reverse surface of the subject at the same time; and an inspection means 7 that inspects conditions of a portion of the edge, which is inclined with respect to the surface or the reverse surface using the image obtained by the imaging means.
Public/Granted literature
- US20090086196A1 Edge inspection apparatus Public/Granted day:2009-04-02
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