Invention Grant
- Patent Title: Inspection technique for transparent substrates
- Patent Title (中): 透明基板检验技术
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Application No.: US11809091Application Date: 2007-05-31
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Publication No.: US07800749B2Publication Date: 2010-09-21
- Inventor: Philip Robert LeBlanc , Douglas S Goodman
- Applicant: Philip Robert LeBlanc , Douglas S Goodman
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Robert P. Santandrea
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
A method for inspecting a transparent substrate provides an index-matching fluid between an index-matched optical coupler and a surface of the transparent substrate. The method repeats, at two or more positions along the surface of the transparent substrate, steps of illuminating an inspection volume within the transparent substrate by directing a ribbon of light through the optical coupler and into the transparent substrate and detecting scattered light from the inspection volume at a detector that is optically conjugate with the inspection volume.
Public/Granted literature
- US20080297784A1 Inspection technique for transparent substrates Public/Granted day:2008-12-04
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