Invention Grant
- Patent Title: Packaging and testing of multiple MEMS devices on a wafer
- Patent Title (中): 在晶片上封装和测试多个MEMS器件
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Application No.: US12186747Application Date: 2008-08-06
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Publication No.: US07800810B2Publication Date: 2010-09-21
- Inventor: Shaoher X. Pan , Vlad Novotny
- Applicant: Shaoher X. Pan , Vlad Novotny
- Applicant Address: US CA Sunnyvale
- Assignee: Spatial Photonics, Inc.
- Current Assignee: Spatial Photonics, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Fish & Richardson P.C.
- Main IPC: G02B26/00
- IPC: G02B26/00 ; H01L23/58 ; H01L21/66

Abstract:
A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.
Public/Granted literature
- US20100033799A1 PACKAGING AND TESTING OF MULTIPLE MEMS DEVICES ON A WAFER Public/Granted day:2010-02-11
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