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US07801407B2 Optical inspection of optical specimens supported by a work holder 有权
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Optical inspection of optical specimens supported by a work holder
Abstract:
An optical inspection system includes an optical inspection device and an interface. The optical inspection device houses optical imaging components that acquire microscope visual images and acquire interference fringe images of a plurality of optical specimens along an optical path. The optical path is located along an optical axis of the optical inspection device. The interface is coupled to the optical inspection device and is configured to removably engage a polishing work holder that supports the plurality of optical specimens. The interface allows an optical specimen axis of each of the plurality of optical specimens and the optical axis of the optical inspection device to be aligned.
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