Invention Grant
US07801407B2 Optical inspection of optical specimens supported by a work holder
有权
由工件支架支撑的光学试样的光学检查
- Patent Title: Optical inspection of optical specimens supported by a work holder
- Patent Title (中): 由工件支架支撑的光学试样的光学检查
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Application No.: US12389683Application Date: 2009-02-20
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Publication No.: US07801407B2Publication Date: 2010-09-21
- Inventor: Lubomir Koudelka , Peter David Koudelka
- Applicant: Lubomir Koudelka , Peter David Koudelka
- Applicant Address: US MN Shoreview
- Assignee: Promet International, Inc.
- Current Assignee: Promet International, Inc.
- Current Assignee Address: US MN Shoreview
- Agency: Westman, Champlin & Kelly, P.A.
- Agent Leanne Taveggia Farrell
- Main IPC: G02B6/00
- IPC: G02B6/00 ; G01N21/00

Abstract:
An optical inspection system includes an optical inspection device and an interface. The optical inspection device houses optical imaging components that acquire microscope visual images and acquire interference fringe images of a plurality of optical specimens along an optical path. The optical path is located along an optical axis of the optical inspection device. The interface is coupled to the optical inspection device and is configured to removably engage a polishing work holder that supports the plurality of optical specimens. The interface allows an optical specimen axis of each of the plurality of optical specimens and the optical axis of the optical inspection device to be aligned.
Public/Granted literature
- US20090185172A1 Optical Inspection of Optical Specimens Supported by a Work Holder Public/Granted day:2009-07-23
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