Invention Grant
- Patent Title: Faceted mirror apparatus
- Patent Title (中): 分面镜装置
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Application No.: US12338049Application Date: 2008-12-18
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Publication No.: US07802891B2Publication Date: 2010-09-28
- Inventor: Andreas Seifert , Markus Weiss , Andreas Heisler , Stefan Dornheim
- Applicant: Andreas Seifert , Markus Weiss , Andreas Heisler , Stefan Dornheim
- Applicant Address: DE
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE
- Agency: GrayRobnson, P.A.
- Priority: DE10302664 20030124
- Main IPC: G02B5/08
- IPC: G02B5/08

Abstract:
A faceted mirror apparatus includes a support plate having a plurality of stepped reception bores into which are fitted the base portions of respective ones of a plurality of mirror facets having mirrored surfaces. An outer surface of each of the facets bears on an inner wall to provide a stable alignment of the optical axes of the mirrored surfaces such that the apparatus generates a beam of rays from impinging rays.
Public/Granted literature
- US20090097142A1 FACETED MIRROR APPARATUS Public/Granted day:2009-04-16
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