Invention Grant
- Patent Title: Device for plasma-activated vapor coating of large surfaces
- Patent Title (中): 用于大面积等离子体激活蒸气涂层的装置
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Application No.: US10480791Application Date: 2002-06-13
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Publication No.: US07803255B2Publication Date: 2010-09-28
- Inventor: Manfred Neumann , Steffen Straach , Mario Krug , Nicolas Schiller
- Applicant: Manfred Neumann , Steffen Straach , Mario Krug , Nicolas Schiller
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V.
- Current Assignee Address: DE Munich
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: DE10129507 20010619
- International Application: PCT/EP02/06505 WO 20020613
- International Announcement: WO02/103077 WO 20021227
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C16/00

Abstract:
The invention relates to a device for the plasma activated vapor coating of large-surface moved substrates, comprising at least one vacuum recipient, one pump system, one evaporator, one device for holding and transporting the substrates to be coated and at least one arc discharge plasma source, whereby at least one device for generating a magnetic field is included, which device can generate a magnetic field between the evaporator and the substrate, the field lines of which magnetic field are aligned approximately perpendicular to the movement direction and parallel to the transport plane of the substrate, and at least one arc discharge plasma source is arranged such that the axis of the arc discharge plasma source is aligned approximately perpendicular to the field lines of the magnetic field.
Public/Granted literature
- US20040168635A1 Device for vacuum metallising large surfaces by plasma activation Public/Granted day:2004-09-02
Information query
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