Invention Grant
- Patent Title: Current-leveling electroplating/electropolishing electrode
- Patent Title (中): 电流调平电镀/电解抛光电极
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Application No.: US10971836Application Date: 2004-10-22
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Publication No.: US07803257B2Publication Date: 2010-09-28
- Inventor: Shih-Chieh Chang , Ying-Lang Wang , Kei-Wei Chen , Shih-Ho Lin , Chun-Chang Chen
- Applicant: Shih-Chieh Chang , Ying-Lang Wang , Kei-Wei Chen , Shih-Ho Lin , Chun-Chang Chen
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company
- Current Assignee: Taiwan Semiconductor Manufacturing Company
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Main IPC: C25D17/14
- IPC: C25D17/14 ; C25D17/12

Abstract:
A current-leveling electrode for improving electroplating and electrochemical polishing uniformity in the electrochemical plating or electropolishing of metals on a substrate is disclosed. The current-leveling electrode includes a base electrode and at least one sub-electrode carried by the base electrode. The at least one sub-electrode has a width which is less than a width of the base electrode to impart a generally tapered, stepped or convex configuration to the current-leveling electrode.
Public/Granted literature
- US20060086609A1 Current-leveling electroplating/electropolishing electrode Public/Granted day:2006-04-27
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