Invention Grant
US07803304B2 Method and apparatus for manufacturing plate-like structure 失效
制造板状结构的方法和装置

Method and apparatus for manufacturing plate-like structure
Abstract:
A method for manufacturing a plate-like structure, the method including a step of transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of a hollow cylindrical upper and a press surface of a lower mold, and pressurizing central parts of the upper and lower molds to apply pressure to the master and the transferred substrate, wherein a compressive load imposed on inner peripheral portions of the upper and lower molds is blocked and distributed toward outer peripheries of the upper and lower molds.
Public/Granted literature
Information query
Patent Agency Ranking
0/0