Invention Grant
- Patent Title: Amorphous carbon film forming method and device
- Patent Title (中): 无定形碳膜成膜方法及装置
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Application No.: US10544674Application Date: 2004-02-12
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Publication No.: US07803433B2Publication Date: 2010-09-28
- Inventor: Junji Ando , Naoyuki Sakai , Toshiyuki Saito , Kazuyuki Nakanishi , Hiroyuki Mori , Hideo Tachikawa , Kyouji Itou , Mikio Fujioka , Yoshiyuki Funaki
- Applicant: Junji Ando , Naoyuki Sakai , Toshiyuki Saito , Kazuyuki Nakanishi , Hiroyuki Mori , Hideo Tachikawa , Kyouji Itou , Mikio Fujioka , Yoshiyuki Funaki
- Applicant Address: JP Osaka
- Assignee: JTEKT Corporation
- Current Assignee: JTEKT Corporation
- Current Assignee Address: JP Osaka
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2003-033859 20030212
- International Application: PCT/JP2004/001482 WO 20040212
- International Announcement: WO2004/072322 WO 20040826
- Main IPC: H05H1/24
- IPC: H05H1/24 ; H01F41/00 ; G21H5/00 ; G21H1/00 ; B01J19/08

Abstract:
An amorphous carbon film forming apparatus according to the present invention is characterized by being provided with a film forming furnace 11; plural workpiece fixtures 23 for supporting plural plate-like workpieces 22 in a state that the same are piled up vertically in parallel with the interval between facing surfaces of two vertically adjoining of the plate-like workpieces 22 being in a range of 2 to 30 millimeters, the plural workpiece fixtures 23 being arranged within the film forming furnace 11 at a regular angular interval on a circle and being connected to a negative electrode; nozzles 31, 32 provided for supplying a processing gas and including at least one nozzle arranged at a center of the circle on which the plural workpiece fixtures 23 are arranged and plural nozzles arranged at a regular angular interval on another circle which surrounds the workpieces fixtures 23 radially outside thereof; and a plasma power supply connected to at least the workpiece fixtures 23. By controlling the supply gas pressure to be in a range of 13 to 1,330 Pa and a sheath width to be made in a range of 2 to 30 mm, the discharge is kept stably. As a consequence, it can be realized to form amorphous carbon films efficiently at a low cost.
Public/Granted literature
- US20080317976A1 Amorphous Carbon Film Forming Method and Device Public/Granted day:2008-12-25
Information query
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