Invention Grant
US07803646B2 Method for producing a component having a semiconductor substrate and component
有权
用于制造具有半导体衬底和部件的部件的方法
- Patent Title: Method for producing a component having a semiconductor substrate and component
- Patent Title (中): 用于制造具有半导体衬底和部件的部件的方法
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Application No.: US10544821Application Date: 2003-11-06
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Publication No.: US07803646B2Publication Date: 2010-09-28
- Inventor: Frank Fischer , Thorsten Pannek , Lars Metzger
- Applicant: Frank Fischer , Thorsten Pannek , Lars Metzger
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE10306129 20030214
- International Application: PCT/DE03/03688 WO 20031106
- International Announcement: WO2004/071944 WO 20040826
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for producing a component having a semiconductor substrate, in which porous semiconductor material is generated for the purpose of developing at least one thermally decoupled pattern. In the material that has been rendered porous, a recess or a plurality of recesses is/are etched to produce at least one region that is defined by the one recess or the plurality of recesses and is thermally decoupled. On the at least one region, the pattern to be thermally decoupled is then formed.
Public/Granted literature
- US20060258037A1 METHOD FOR PRODUCING A COMPONENT HAVING A SEMICONDUCTOR SUBSTRATE AND COMPONENT Public/Granted day:2006-11-16
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