Invention Grant
US07803646B2 Method for producing a component having a semiconductor substrate and component 有权
用于制造具有半导体衬底和部件的部件的方法

Method for producing a component having a semiconductor substrate and component
Abstract:
A method for producing a component having a semiconductor substrate, in which porous semiconductor material is generated for the purpose of developing at least one thermally decoupled pattern. In the material that has been rendered porous, a recess or a plurality of recesses is/are etched to produce at least one region that is defined by the one recess or the plurality of recesses and is thermally decoupled. On the at least one region, the pattern to be thermally decoupled is then formed.
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