Invention Grant
- Patent Title: Method of manufacturing a variable resistance structure and method of manufacturing a phase-change memory device using the same
- Patent Title (中): 制造可变电阻结构的方法以及使用其制造相变存储器件的方法
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Application No.: US12654714Application Date: 2009-12-30
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Publication No.: US07803657B2Publication Date: 2010-09-28
- Inventor: Suk-Hun Choi , Chang-Ki Hong , Yoon-Ho Son , Jang-Eun Heo
- Applicant: Suk-Hun Choi , Chang-Ki Hong , Yoon-Ho Son , Jang-Eun Heo
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce
- Priority: KR2005-67366 20050725
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L29/08 ; H01L29/18

Abstract:
In methods of manufacturing a variable resistance structure and a phase-change memory device, after forming a first insulation layer on a substrate having a contact region, a contact hole exposing the contact region is formed through the first insulation layer. After forming a first conductive layer on the first insulation layer to fill up the contact hole, a first protection layer pattern is formed on the first conductive layer. The first conductive layer is partially etched to form a contact and to form a pad on the contact. A second protection layer is formed on the first protection layer pattern, and then an opening exposing the pad is formed through the second protection layer and the first protection layer pattern. After formation of a first electrode, a phase-change material layer pattern and a second electrode are formed on the first electrode and the second protection layer.
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