Invention Grant
- Patent Title: Determining dopant information
- Patent Title (中): 确定掺杂剂信息
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Application No.: US11853471Application Date: 2007-09-11
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Publication No.: US07804068B2Publication Date: 2010-09-28
- Inventor: John A. Notte, IV
- Applicant: John A. Notte, IV
- Applicant Address: US MA Peabody
- Assignee: ALIS Corporation
- Current Assignee: ALIS Corporation
- Current Assignee Address: US MA Peabody
- Agency: Fish & Richardson P.C.
- Main IPC: H01J37/26
- IPC: H01J37/26
Abstract:
Methods that include using a noble gas ion beam to determine dopant information for a sample are disclosed, the dopant information including dopant concentration in the sample, dopant location in the sample, or both.
Public/Granted literature
- US20080111069A1 DETERMINING DOPANT INFORMATION Public/Granted day:2008-05-15
Information query
