Invention Grant
- Patent Title: Imaging apparatus and method
- Patent Title (中): 成像设备及方法
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Application No.: US11228353Application Date: 2005-09-19
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Publication No.: US07804069B2Publication Date: 2010-09-28
- Inventor: William R. Tribe
- Applicant: William R. Tribe
- Applicant Address: GB Cambridge
- Assignee: TeraView Limited
- Current Assignee: TeraView Limited
- Current Assignee Address: GB Cambridge
- Agency: Dickstein Shapiro LLP
- Priority: GB0420748.6 20040917
- Main IPC: G01J1/10
- IPC: G01J1/10 ; G01J3/00

Abstract:
A method for imaging a sample, the method comprising the steps of: (a) irradiating the surface of a sample with a source of coherent substantially continuous radiation with a frequency in the range 25 GHz to 100 THz; (b) detecting said radiation reflected from or transmitted by the sample; (c) providing and detecting a probe beam having a phase related to that of the radiation leaving the source; (d) analysing the detected radiation for at least one characteristic feature within the radiation and monitoring any change in phase of such at least one feature in order to derive structural information about the sample as a function of depth from the surface of the sample.
Public/Granted literature
- US20060113480A1 Imaging apparatus and method Public/Granted day:2006-06-01
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