Invention Grant
- Patent Title: Semiconductor device having plural DRAM memory cells and a logic circuit and method for manufacturing the same
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Application No.: US12635181Application Date: 2009-12-10
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Publication No.: US07804118B2Publication Date: 2010-09-28
- Inventor: Satoru Akiyama , Takao Watanabe , Yuichi Matsui , Masahiko Hiratani
- Applicant: Satoru Akiyama , Takao Watanabe , Yuichi Matsui , Masahiko Hiratani
- Applicant Address: JP Tokyo
- Assignee: Renesas Technology Corp.
- Current Assignee: Renesas Technology Corp.
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, P.C.
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
A memory cell capacitor (C3) of a DRAM is formed by use of a MIM capacitor which uses as its electrode a metal wiring line of the same layer (M3) as metal wiring lines within a logic circuit (LOGIC), thereby enabling reduction of process costs. Higher integration is achievable by forming the capacitor using a high dielectric constant material and disposing it above a wiring layer in which bit lines (BL) are formed. In addition, using 2T cells makes it possible to provide a sufficient signal amount even when letting them operate with a low voltage. By commonizing the processes for fabricating capacitors in analog (ANALOG) and memory (MEM), it is possible to realize a semiconductor integrated circuit with the logic, analog and memory mounted together on one chip at low costs.
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