Invention Grant
- Patent Title: Non-volatile memory
- Patent Title (中): 非易失性存储器
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Application No.: US12434828Application Date: 2009-05-04
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Publication No.: US07804122B2Publication Date: 2010-09-28
- Inventor: Chin-Hsien Chen , Ying-Tso Chen , Chien-Hung Liu , Shou-Wei Huang
- Applicant: Chin-Hsien Chen , Ying-Tso Chen , Chien-Hung Liu , Shou-Wei Huang
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd
- Current Assignee: MACRONIX International Co., Ltd
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L31/119
- IPC: H01L31/119

Abstract:
A non-volatile memory includes a substrate having two openings, a stacked gate structure disposed on the substrate between the two openings, a liner disposed on a bottom of each of the two openings and parts of a sidewall of each of the two openings, a second conductive layer disposed on the liner at the bottom of each of the two openings, and a third conductive layer on the second conductive layer and the liner. The stacked gate structure includes a first dielectric layer, a charge storage layer, a second dielectric layer, and a first conductive layer. The liner has a top surface lower than that of the substrate. The second conductive layer has a top surface co-planar with that of the liner. The third conductive layer has a top surface at least co-planar with that of the substrate and lower than that of the first dielectric layer.
Public/Granted literature
- US20090212353A1 NON-VOLATILE MEMORY Public/Granted day:2009-08-27
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