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US07804291B2 Semiconductor test device with heating circuit 有权
带加热电路的半导体测试装置

Semiconductor test device with heating circuit
Abstract:
A semiconductor test device includes a test circuit having contacts for applying an electrical signal and measuring electrical parameters of the test circuit. The semiconductor test device also includes an integrally formed heating circuit comprising at least one circuit meander positioned adjacent the test circuit for raising a temperature within a portion of the test circuit.
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