Invention Grant
US07804382B2 Tunable resonator using film bulk acoustic resonator (FBAR) 有权
使用膜体声波谐振器(FBAR)的可调谐谐振器

Tunable resonator using film bulk acoustic resonator (FBAR)
Abstract:
A tunable resonator is provided. The tunable resonator includes a film bulk acoustic resonator (FBAR) for performing a resonance, and at least one driver which is arranged at a side of the FBAR and is deformed and brought into contact with the FBAR by an external signal, thereby changing a resonance frequency of the FBAR. Accordingly, a multiband integration and a one-chip manufacture can be implemented simply using a micro electro mechanical system (MEMS) technology and a mass production is possible.
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