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US07804590B2 Multi mode inspection method and apparatus 有权
多模式检查方法和装置

Multi mode inspection method and apparatus
Abstract:
An inspection system for inspecting an object, the system comprising an illuminator including at least one pulsed light source, a detector assembly, and a relative motion provider operative to provide motion of the object relative to the detector assembly, along an axis of motion, the detector assembly comprising a plurality of 2-dimensional detector units whose active areas are arranged at intervals.
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