Invention Grant
- Patent Title: Multi mode inspection method and apparatus
- Patent Title (中): 多模式检查方法和装置
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Application No.: US12316302Application Date: 2008-12-10
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Publication No.: US07804590B2Publication Date: 2010-09-28
- Inventor: Dov Furman , Noam Dotan , Efraim Miklatzky
- Applicant: Dov Furman , Noam Dotan , Efraim Miklatzky
- Applicant Address: SG Singapore
- Assignee: Applied Materials South East Asia Pte. Ltd.
- Current Assignee: Applied Materials South East Asia Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Sonnenschein Nath & Rosenthal LLP
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
An inspection system for inspecting an object, the system comprising an illuminator including at least one pulsed light source, a detector assembly, and a relative motion provider operative to provide motion of the object relative to the detector assembly, along an axis of motion, the detector assembly comprising a plurality of 2-dimensional detector units whose active areas are arranged at intervals.
Public/Granted literature
- US20090091749A1 Multi mode inspection method and apparatus Public/Granted day:2009-04-09
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