Invention Grant
- Patent Title: Scanning examination apparatus
- Patent Title (中): 扫描检查仪
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Application No.: US11913833Application Date: 2006-05-16
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Publication No.: US07804642B2Publication Date: 2010-09-28
- Inventor: Nobuyuki Nagasawa , Masahiro Oba , Tetsuya Koike , Yoshihisa Tanikawa , Yujin Arai
- Applicant: Nobuyuki Nagasawa , Masahiro Oba , Tetsuya Koike , Yoshihisa Tanikawa , Yujin Arai
- Applicant Address: JP Tokyo
- Assignee: Olympus Corporation
- Current Assignee: Olympus Corporation
- Current Assignee Address: JP Tokyo
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: JP2005-142376 20050516; JP2005-202830 20050712; JP2005-254917 20050902
- International Application: PCT/JP2006/309715 WO 20060516
- International Announcement: WO2006/123641 WO 20061123
- Main IPC: G02B21/06
- IPC: G02B21/06

Abstract:
A scanning examination apparatus 1 is provided, the apparatus including a detachable objective lens 6 or 6′, a scanner 3 for two-dimensionally scanning light F from a specimen 100 focused by the objective lens 6 or 6′, a scanner control device 13 for controlling the operation of the scanner 3, and an optical detector 9 for detecting light scanned by the scanner 3, wherein the scanner control device 13 changes the scanning direction of the light F depending on an image formation mode of the light F at the objective lens 6 or 6′ which is attached.
Public/Granted literature
- US20090073554A1 SCANNING EXAMINATION APPARATUS Public/Granted day:2009-03-19
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