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US07804663B2 High frequency interconnect signal transmission lines 有权
高频互连信号传输线

High frequency interconnect signal transmission lines
Abstract:
A micro-electromechanical signal transmission line is made from an electrically conductive material. It has a first distal end and a second distal end. The second distal end is free to move with respect to said first distal end. There exists an unsupported region between the first distal end and the second distal end. The unsupported region is juxtaposed at a controlled distance from at least one grounded conductive surface.
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