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US07804703B2 Phase change memory device having Schottky diode and method of fabricating the same 有权
具有肖特基二极管的相变存储器件及其制造方法

Phase change memory device having Schottky diode and method of fabricating the same
Abstract:
A phase change memory device includes wordlines extending along a direction on a semiconductor substrate. Low concentration semiconductor patterns are disposed on the wordlines. Node electrodes are disposed on the low concentration semiconductor patterns. Schottky diodes are disposed between the low concentration semiconductor patterns and the node electrodes. Phase change resistors are disposed on the node electrodes.
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