Invention Grant
- Patent Title: Slit valve
- Patent Title (中): 狭缝阀
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Application No.: US11756632Application Date: 2007-06-01
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Publication No.: US07806383B2Publication Date: 2010-10-05
- Inventor: Toan Q. Tran , Dimitry Lubormirsky , Lun Tsuei , Won Bang
- Applicant: Toan Q. Tran , Dimitry Lubormirsky , Lun Tsuei , Won Bang
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser IP Law Group
- Main IPC: F16K25/00
- IPC: F16K25/00

Abstract:
Embodiments of a valve assembly for a process chamber having improved seal performance are provided herein. In some embodiments, a valve assembly for a process chamber includes a housing having an opening disposed in a wall thereof and through which a substrate may be transferred; a door movably coupled to the housing in a plane substantially parallel to the wall of the housing for selectively sealing the opening; a compressible sealing member disposed at least partly between an upper surface of the door and a corresponding surface of the housing for forming a seal therebetween by compression of the compressible sealing member in a direction substantially perpendicular to the wall when the door is in a closed position; and a mechanism for restricting the exposure of the compressible sealing member to an environment on a process chamber side of the housing.
Public/Granted literature
- US20080296304A1 SLIT VALVE Public/Granted day:2008-12-04
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