Invention Grant
- Patent Title: Substrate pick
- Patent Title (中): 基板选择
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Application No.: US11469185Application Date: 2006-08-31
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Publication No.: US07806449B2Publication Date: 2010-10-05
- Inventor: Mike Chalom , Jon Oliver , Ty Gabby , Timothy A. Strodtbeck
- Applicant: Mike Chalom , Jon Oliver , Ty Gabby , Timothy A. Strodtbeck
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: B25J1/00
- IPC: B25J1/00

Abstract:
A device for handling devices, such as reticles, in a semiconductor manufacturing environment. In one illustrative embodiment, the device includes a body, a plurality of spaced-apart grippers and a plurality of magnets for producing a magnetic force to secure a semiconducting substrate or reticle between the spaced-apart grippers. In an embodiment, the magnets are surrounded by magnetic shielding.
Public/Granted literature
- US20080054657A1 SUBSTRATE PICK Public/Granted day:2008-03-06
Information query
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