Invention Grant
US07806449B2 Substrate pick 失效
基板选择

Substrate pick
Abstract:
A device for handling devices, such as reticles, in a semiconductor manufacturing environment. In one illustrative embodiment, the device includes a body, a plurality of spaced-apart grippers and a plurality of magnets for producing a magnetic force to secure a semiconducting substrate or reticle between the spaced-apart grippers. In an embodiment, the magnets are surrounded by magnetic shielding.
Public/Granted literature
Information query
Patent Agency Ranking
0/0