Invention Grant
- Patent Title: Elevator-based tool loading and buffering system
- Patent Title (中): 电梯工具装载和缓冲系统
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Application No.: US11210918Application Date: 2005-08-23
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Publication No.: US07806643B2Publication Date: 2010-10-05
- Inventor: Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
- Applicant: Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Richard Pickreign
- Main IPC: B65H1/00
- IPC: B65H1/00 ; B65G65/00
Abstract:
A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.
Public/Granted literature
- US20060099054A1 Elevator-based tool loading and buffering system Public/Granted day:2006-05-11
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