Invention Grant
- Patent Title: Transportation system and transportation method
- Patent Title (中): 运输系统和运输方式
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Application No.: US11783323Application Date: 2007-04-09
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Publication No.: US07806648B2Publication Date: 2010-10-05
- Inventor: Yasuhisa Ito
- Applicant: Yasuhisa Ito
- Applicant Address: JP Kyoto-shi
- Assignee: Murata Kikai Kabushiki Kaisha
- Current Assignee: Murata Kikai Kabushiki Kaisha
- Current Assignee Address: JP Kyoto-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2006-112401 20060414
- Main IPC: B65G1/00
- IPC: B65G1/00
Abstract:
A conveyor 4 for transporting a reticle cassette 18 is provided. A lifter 16 of a rail vehicle 14 lifts the reticle cassette 18 for transferring the reticle cassette 18 between the inside of a dummy FOUP 22 and the conveyor 4.
Public/Granted literature
- US20070284217A1 Transportation system and transportation method Public/Granted day:2007-12-13
Information query
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