Invention Grant
US07806981B2 Method for the treatment of a web-type material in a plasma-assisted process
有权
用于在等离子体辅助工艺中处理网状材料的装置
- Patent Title: Method for the treatment of a web-type material in a plasma-assisted process
- Patent Title (中): 用于在等离子体辅助工艺中处理网状材料的装置
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Application No.: US10529533Application Date: 2003-09-09
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Publication No.: US07806981B2Publication Date: 2010-10-05
- Inventor: Pierre Fayet , Bertrand Jaccoud
- Applicant: Pierre Fayet , Bertrand Jaccoud
- Applicant Address: CH Pully
- Assignee: Tetra Laval Holdings & Finance S.A.
- Current Assignee: Tetra Laval Holdings & Finance S.A.
- Current Assignee Address: CH Pully
- Agency: Rankin, Hill & Clark LLP
- Priority: CH1652/02 20021003
- International Application: PCT/CH03/00609 WO 20030909
- International Announcement: WO2004/032175 WO 20040415
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
A device for treating a web material in a continuous plasma enhanced process includes a vacuum chamber (1) with device (2) for maintaining a constant reduced pressure within the chamber (1) and, arranged within the chamber (1), a rotating drum (3) for supporting and transporting the web (4), a magnetron device facing the web (4) supported and transported by the drum (3) and a gas supply device for supplying a process gas or process gas mixture to the space (10) between the drum and the magnetron device in which space (10) the plasma is sustained. The magnetron device has a plurality of independent magnetron electrodes (6) with rectangular magnetron faces arranged beside each other in parallel. Each magnetron electrode (6) is individually powered with an alternating voltage by its own power supply (7). The drum (3) is electrically grounded, floating or negatively biased.
Public/Granted literature
- US20060150908A1 Method for the treatment of a web-type material in a plasma-assisted process Public/Granted day:2006-07-13
Information query
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