Invention Grant
- Patent Title: Vacuum device where power supply mechanism is mounted and power supply method
- Patent Title (中): 安装电源机构的真空装置和电源方式
-
Application No.: US11578056Application Date: 2005-01-24
-
Publication No.: US07806985B2Publication Date: 2010-10-05
- Inventor: Masayuki Takimoto , Hiroyuki Komuro , Yutaka Fuse , Tatsumi Abe , Kazuhito Aonahata
- Applicant: Masayuki Takimoto , Hiroyuki Komuro , Yutaka Fuse , Tatsumi Abe , Kazuhito Aonahata
- Applicant Address: JP Sagamihara, Kanagawa
- Assignee: Showa Shinku Co., Ltd.
- Current Assignee: Showa Shinku Co., Ltd.
- Current Assignee Address: JP Sagamihara, Kanagawa
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2004-204457 20040712
- International Application: PCT/JP2005/000852 WO 20050124
- International Announcement: WO2006/006263 WO 20060119
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306

Abstract:
An improvement has been made in contact states between a rotating electrode arranged inside a vacuum chamber and a power supply mechanism which touches the rotating electrode to supply electric power thereto. A vacuum device is provided with a vacuum chamber, a rotating electrode arranged inside and electrically insulated from the vacuum chamber, and a power supply mechanism which touches the rotating electrode to supply electric power thereto, wherein the rotating electrode has an annular shape and horizontally rotates with respect to the center axis of the annular shape, and the power supply mechanism is composed of electrode members, and the electrode member and the rotating electrode come into contact with each other at at least one contact surface.
Public/Granted literature
- US20070215047A1 Vacuum Device Where Power Supply Mechanism Is Mounted And Power Supply Method Public/Granted day:2007-09-20
Information query
IPC分类: