Invention Grant
US07806986B2 Substrate cleaning apparatus and substrate cleaning method using the same 有权
基板清洗装置及使用其的基板清洗方法

Substrate cleaning apparatus and substrate cleaning method using the same
Abstract:
Disclosed is a substrate cleaning apparatus including a brush cleaning unit which cleans a substrate by making a roll brush in contact with a surface of the substrate, and a transporting unit which conveys the substrate. The roll brush includes a bristle. At least one of a diameter of the roll brush, stiffness of the bristle, and density of the bristle becomes larger from an end portion of the roll brush to a central portion thereof.
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