Invention Grant
- Patent Title: Photomask for double exposure and double exposure method using the same
- Patent Title (中): 双曝光光掩模和双曝光法使用
-
Application No.: US11317500Application Date: 2005-12-22
-
Publication No.: US07807322B2Publication Date: 2010-10-05
- Inventor: Chan Ha Park
- Applicant: Chan Ha Park
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Townsend and Townsend and Crew LLP
- Priority: KR10-2005-0081972 20050903
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G03F7/22

Abstract:
A photomask for double exposure, and a double exposure method using the same are disclosed. The photomask for double exposure comprises a mask substrate divided into first and second regions equally arranged to upper and lower sides on different sides, respectively, a first mask pattern formed on the first region of the mask substrate, and a second mask pattern formed on the second region of the mask substrate. The photomask and the double exposure method using the same enable a finer photoresist pattern to be formed on a semiconductor wafer, while minimizing reduction in yield and productivity due to misalignment and replacement.
Public/Granted literature
- US20070054198A1 Photomask for double exposure and double exposure method using the same Public/Granted day:2007-03-08
Information query