Invention Grant
US07807322B2 Photomask for double exposure and double exposure method using the same 失效
双曝光光掩模和双曝光法使用

Photomask for double exposure and double exposure method using the same
Abstract:
A photomask for double exposure, and a double exposure method using the same are disclosed. The photomask for double exposure comprises a mask substrate divided into first and second regions equally arranged to upper and lower sides on different sides, respectively, a first mask pattern formed on the first region of the mask substrate, and a second mask pattern formed on the second region of the mask substrate. The photomask and the double exposure method using the same enable a finer photoresist pattern to be formed on a semiconductor wafer, while minimizing reduction in yield and productivity due to misalignment and replacement.
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