Invention Grant
- Patent Title: Photoresists for visible light imaging
- Patent Title (中): 用于可见光成像的光致抗蚀剂
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Application No.: US12050589Application Date: 2008-03-18
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Publication No.: US07807340B2Publication Date: 2010-10-05
- Inventor: Gregory Breyta , Daniel Joseph Dawson , Carl E. Larson , Gregory Michael Wallraff
- Applicant: Gregory Breyta , Daniel Joseph Dawson , Carl E. Larson , Gregory Michael Wallraff
- Applicant Address: US NY Armmonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armmonk
- Agency: Bozicevic, Field & Francis LLP
- Agent Isaac M. Rutenberg
- Main IPC: G03F7/26
- IPC: G03F7/26

Abstract:
A method of creating patterned objects using a class of lithographic photoresist combinations is disclosed which is suitable for use with visible light and does not require a post-exposure bake step. The disclosed photoresists are preferably chemical amplification photoresists and contain a photosensitizer having the structure of formula (I): where Ar1 and Ar2 are independently selected from monocyclic aryl and monocyclic heteroaryl, R1 and R2 may be the same or different, and have the structure —X—R3 where X is O or S and R3 is C1-C6 hydrocarbyl or heteroatom-containing C1-C6 hydrocarbyl, and R4 and R5 are independently selected from the group consisting of hydrogen and —X—R3, or, if ortho to each other, may be taken together to form a five- or six-membered aromatic ring, with the proviso that any heteroatom contained within Ar1, Ar2, or R3 is O or S. The use of the disclosed photoresists, particularly for the manufacture of holographic diffraction gratings, is also disclosed.
Public/Granted literature
- US20080166669A1 Photoresists for Visible Light Imaging Public/Granted day:2008-07-10
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