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US07807491B2 Method of manufacturing nitride semiconductor light-emitting device 有权
制造氮化物半导体发光器件的方法

Method of manufacturing nitride semiconductor light-emitting device
Abstract:
Provided is a method of manufacturing a nitride semiconductor light-emitting device including the step of contacting a surfactant material with the surface of an n-type nitride semiconductor layer or the surface of a p-type nitride semiconductor layer before the growth of an active layer, or, with a grown crystal surface during or after the growth of the active layer. According to this manufacturing method, a nitride semiconductor light-emitting device having higher light-emitting efficiency can be obtained.
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