Invention Grant
US07807492B2 Magnetoresistive random access memory with improved layout design and process thereof 有权
具有改进的布局设计及其工艺的磁阻随机存取存储器

Magnetoresistive random access memory with improved layout design and process thereof
Abstract:
A MRAM memory and process thereof is described. A GMR magnetic layer is patterned to form a memory bit layer and an intermediate conductive layer. The intermediate conductive layer is disposed between two conductive layers such that shallow metal plugs can be utilized to interconnect the intermediate conductive layer and the conductive layers. Thus, a conventional deep tungsten plug process, interconnecting two conductive layers, is eliminated.
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