Invention Grant
US07807515B2 Oxide semiconductor, thin-film transistor and method for producing the same
失效
氧化物半导体,薄膜晶体管及其制造方法
- Patent Title: Oxide semiconductor, thin-film transistor and method for producing the same
- Patent Title (中): 氧化物半导体,薄膜晶体管及其制造方法
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Application No.: US12086628Application Date: 2007-05-25
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Publication No.: US07807515B2Publication Date: 2010-10-05
- Inventor: Hisato Kato , Haruo Kawakami , Nobuyuki Sekine , Kyoko Kato
- Applicant: Hisato Kato , Haruo Kawakami , Nobuyuki Sekine , Kyoko Kato
- Applicant Address: JP Kawasaki-Shi, Kanagawa-Ken
- Assignee: Fuji Electric Holding Co., Ltd.
- Current Assignee: Fuji Electric Holding Co., Ltd.
- Current Assignee Address: JP Kawasaki-Shi, Kanagawa-Ken
- Agent Manabu Kanesaka
- Priority: JP2006-144946 20060525
- International Application: PCT/JP2007/060686 WO 20070525
- International Announcement: WO2007/139009 WO 20071206
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84

Abstract:
Disclosed is an oxide semiconductor having an amorphous structure, wherein higher mobility and reduced carrier concentration are achieved. Also disclosed are a thin film transistor, a method for producing the oxide semiconductor, and a method for producing the thin film transistor. Specifically disclosed is an oxide semiconductor which is characterized by being composed of an amorphous oxide represented by the following a general formula: Inx+1MZny+1SnzO(4+1.5x+y+2z) (wherein M is Ga or Al, 0≦x≦1, −0.2≦y≦1.2, z≧0.4 and 0.5≦(x+y)/z≦3). This oxide semiconductor is preferably subjected to a heat treatment in an oxidizing gas atmosphere after film formation. Also specifically disclosed is a thin film transistor which is characterized by comprising the oxide semiconductor.
Public/Granted literature
- US20090289249A1 Oxide Semiconductor, Thin-Film Transistor and Method for Producing the Same Public/Granted day:2009-11-26
Information query
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