Invention Grant
- Patent Title: Methods of forming layers comprising epitaxial silicon
- Patent Title (中): 形成包含外延硅的层的方法
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Application No.: US11712151Application Date: 2007-02-28
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Publication No.: US07807535B2Publication Date: 2010-10-05
- Inventor: Nirmal Ramaswamy , Gurtej S. Sandhu , Chris M. Carlson , F. Daniel Gealy
- Applicant: Nirmal Ramaswamy , Gurtej S. Sandhu , Chris M. Carlson , F. Daniel Gealy
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/76 ; H01L21/20 ; H01L21/338

Abstract:
The invention includes methods of forming layers comprising epitaxial silicon. In one implementation, an opening is formed within a first material received over a monocrystalline material. Opposing walls, of a second material, are formed within the opening which are laterally displaced inwardly of the opposing sidewalls, a space being received between the opposing walls and the opposing sidewalls, with monocrystalline material being exposed between the opposing walls within the opening. A silicon-comprising layer is epitaxially grown from the exposed monocrystalline material within the second material-lined opening. Other aspects and implementations are contemplated.
Public/Granted literature
- US20070166962A1 Methods of forming layers comprising epitaxial silicon Public/Granted day:2007-07-19
Information query
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