Invention Grant
US07807944B2 Laser processing device, processing method, and method of producing circuit substrate using the method 失效
激光加工装置,加工方法和使用该方法生产电路基板的方法

Laser processing device, processing method, and method of producing circuit substrate using the method
Abstract:
A laser processing apparatus for performing processing such as perforation on a ceramic green sheet etc. using a laser beam efficiently. The laser processing apparatus is provided with a plurality of optical path systems disposed between a laser oscillator and an irradiation position control optical system for irradiating a predetermined position on a work piece with a laser beam. The plurality of optical path systems includes an optical path system that guides the laser beam to the irradiation position control optical system without changing its cross sectional shape in the direction perpendicular to the optical axis of the laser beam and an optical path system that guides the laser beam while changing its cross sectional shape so that these optical path systems are selectively used in accordance with the processing condition.
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