Invention Grant
- Patent Title: Scanning electron microscope
- Patent Title (中): 扫描电子显微镜
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Application No.: US12250763Application Date: 2008-10-14
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Publication No.: US07807966B2Publication Date: 2010-10-05
- Inventor: Hirohiko Kitsuki , Kazuo Aoki , Mitsugu Sato
- Applicant: Hirohiko Kitsuki , Kazuo Aoki , Mitsugu Sato
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Agency: McDermott Will & Emery LLP
- Priority: JP2005-110082 20050406
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed. The angle of aperture of an optical system having a plurality of convergence lenses is changed by changing the convergence lenses and the hole diameter of a diaphragm. The angle α of aperture of the electron beam is changed in accordance with the visual field range corresponding to a single pixel, i.e. what is called the pixel size.
Public/Granted literature
- US20090050805A1 SCANNING ELECTRON MICROSCOPE Public/Granted day:2009-02-26
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