Invention Grant
- Patent Title: Nonvolatile semiconductor memory apparatus and manufacturing method thereof
- Patent Title (中): 非易失性半导体存储装置及其制造方法
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Application No.: US12375353Application Date: 2007-07-18
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Publication No.: US07807995B2Publication Date: 2010-10-05
- Inventor: Takumi Mikawa , Takesi Takagi
- Applicant: Takumi Mikawa , Takesi Takagi
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2006-204359 20060727
- International Application: PCT/JP2007/064174 WO 20070718
- International Announcement: WO2008/013086 WO 20080131
- Main IPC: H01L29/40
- IPC: H01L29/40

Abstract:
A nonvolatile semiconductor memory apparatus 25 comprises a semiconductor substrate 11, a lower-layer wire 12 formed on the semiconductor substrate 11, an upper-layer wire 20 formed above the lower-layer wire 12 to cross the lower-layer wire 12, an interlayer insulating film 13 provided between the lower-layer wire 12 and the upper-layer wire 20, and a resistance variable layer 15 which is embedded in a contact hole 14 formed in the interlayer insulating film 13 and is electrically connected to the lower-layer wire 12 and the upper-layer wire 20. The upper-layer wire 20 includes at least two layers which are a lowermost layer 21 made of an electrically-conductive material having a hydrogen barrier property and an electric conductor layer 22 having a specific resistance which is lower than a specific resistance of the lowermost layer 21.
Public/Granted literature
- US20090230556A1 NONVOLATILE SEMICONDUCTOR MEMORY APPARATUS AND MANUFACTURING METHOD THEREOF Public/Granted day:2009-09-17
Information query
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