Invention Grant
US07808054B2 OTP memory cell, OTP memory, and method of manufacturing OTP memory cell
失效
OTP存储单元,OTP存储器以及制造OTP存储单元的方法
- Patent Title: OTP memory cell, OTP memory, and method of manufacturing OTP memory cell
- Patent Title (中): OTP存储单元,OTP存储器以及制造OTP存储单元的方法
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Application No.: US12153250Application Date: 2008-05-15
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Publication No.: US07808054B2Publication Date: 2010-10-05
- Inventor: Masahiro Wada
- Applicant: Masahiro Wada
- Applicant Address: JP Kawasaki, Kanagawa
- Assignee: NEC Electronics Corporation
- Current Assignee: NEC Electronics Corporation
- Current Assignee Address: JP Kawasaki, Kanagawa
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2007-131334 20070517
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
An OTP memory cell according to the present invention includes: a semiconductor substrate including a lower electrode forming region having a lower electrode formed therein, a diffusion layer forming region having a source and a drain formed therein, a first trench-type insulating region, and a second trench-type insulating region; an upper electrode being in contact with the first trench-type insulating region and formed on the lower electrode with the first insulating film interposed therebetween; and a gate electrode being in contact with the second trench-type insulating region and formed on a channel region with the second insulating film interposed therebetween, in which a shape of at least a part of an end of the lower electrode forming region in contact with the first insulating film is sharper than a shape of an end of the channel region in contact with the second insulating film.
Public/Granted literature
- US20080283931A1 OTP memory cell, OTP memory, and method of manufacturing OTP memory cell Public/Granted day:2008-11-20
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