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US07808162B2 Stacked piezoelectric element and vibration wave driving apparatus 有权
堆叠压电元件和振动波驱动装置

Stacked piezoelectric element and vibration wave driving apparatus
Abstract:
A stacked piezoelectric element comprising a driving unit and a non-driving unit, and a vibration wave driving apparatus, which are capable of suppressing occurrences of deformation, particularly warping, that are generated during firing and polarization of the stacked piezoelectric element. A driving unit has a first conductive layer and a first piezoelectric layer consisting of a piezoelectric material, which is driven by an application of voltage to the first conductive layer to generate vibration on the stacked piezoelectric element. A non-driving unit has a plurality of second conductive layers and a plurality of second piezoelectric layers consisting of the piezoelectric material, which is arranged to have a thickness that enables generation of the vibration.
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