Invention Grant
- Patent Title: Arrangement for the regulation of the electron beam power of an electron gun
- Patent Title (中): 用于调节电子枪电子束功率的布置
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Application No.: US11373865Application Date: 2006-03-10
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Publication No.: US07808183B2Publication Date: 2010-10-05
- Inventor: Günter Klemm , Andreas Thiede , Hans-Jürgen Schneider
- Applicant: Günter Klemm , Andreas Thiede , Hans-Jürgen Schneider
- Applicant Address: DE Alzenau DE Hanau
- Assignee: Applied Materials GmbH & Co. KG,ALD Vacuum Technologies GmbH
- Current Assignee: Applied Materials GmbH & Co. KG,ALD Vacuum Technologies GmbH
- Current Assignee Address: DE Alzenau DE Hanau
- Agency: Fulbright & Jaworski L.L.P.
- Priority: DE102005020815 20050504
- Main IPC: H05B41/14
- IPC: H05B41/14

Abstract:
An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.
Public/Granted literature
- US20060250092A1 Arrangement for the regulation of the electron beam power of an electron gun Public/Granted day:2006-11-09
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