Invention Grant
- Patent Title: Method for manufacturing substrate, liquid crystal display apparatus and method for manufacturing the same, and electronic device
- Patent Title (中): 制造基板的方法,液晶显示装置及其制造方法以及电子装置
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Application No.: US12166386Application Date: 2008-07-02
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Publication No.: US07808606B2Publication Date: 2010-10-05
- Inventor: Atsushi Denda
- Applicant: Atsushi Denda
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2007-192992 20070725
- Main IPC: G02F1/13
- IPC: G02F1/13 ; G02F1/1343

Abstract:
A method for manufacturing a substrate, includes: coating the substrate with a first layer including a first metallic element by a dry deposition technique; coating the first layer with a photo resist layer; forming on the photo resist layer an exposure portion, a pair of non-exposure portions being in contact with the exposure portion and having a substantially parallel stripe-like plan shape, and a half exposure portion that is a part of an inner region of the non-exposure portions and an outer region of the non-exposure portions; removing the exposure portion and an upper portion of the half exposure portion, the upper portion having been exposed; forming an electrode portion and a wiring portion by etching the first layer exposed by removing the exposure portion; exposing the electrode portion and the wiring portion by removing the half exposure portion of which the upper portion has been removed, and forming a pair of banks by the pair of non-exposure portions; applying a treatment solution including a second metallic element on a recess portion formed by the wiring portion sandwiched between the pair of banks and the pair of banks by a droplet discharge technique; and forming a second layer including the second metallic element on the wiring portion by hardening the applied treatment solution to thicken the wiring portion.
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