Invention Grant
- Patent Title: Fixed-point detector and displacement-measuring apparatus
- Patent Title (中): 定点检测器和位移测量仪
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Application No.: US12144772Application Date: 2008-06-24
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Publication No.: US07808649B2Publication Date: 2010-10-05
- Inventor: Akihiro Kuroda , Hideaki Tamiya
- Applicant: Akihiro Kuroda , Hideaki Tamiya
- Applicant Address: JP Nara
- Assignee: Mori Seiki Co., Ltd.
- Current Assignee: Mori Seiki Co., Ltd.
- Current Assignee Address: JP Nara
- Agency: Sonnenschein Nath & Rosenthal LLP
- Priority: JP2007-192681 20070724
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A fixed-point detector is provided. The fixed-point detector includes a plurality of fixed-point detecting patterns, a fixed-point detecting light source, and a plurality of photoelectric conversion elements. The plurality of fixed-point detecting patterns each have a pair of diffraction gratings for diffracting incident light in different directions. The fixed-point detecting light source irradiates the pair of diffraction gratings with light while moving in the measurement-axis direction with respect to the plurality of fixed-point detecting patterns. The plurality of photoelectric conversion elements move together with the fixed-point detecting light source, while receiving light beams diffracted by the respective diffraction gratings of the plurality of fixed-point detecting patterns and converting the diffracted light beams into electric signals.
Public/Granted literature
- US20090027687A1 FIXED-POINT DETECTOR AND DISPLACEMENT-MEASURING APPARATUS Public/Granted day:2009-01-29
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