Invention Grant
- Patent Title: Advanced-process-control system utilizing a lambda tuner
- Patent Title (中): 使用lambda调谐器的高级过程控制系统
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Application No.: US12006411Application Date: 2007-12-31
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Publication No.: US07809459B2Publication Date: 2010-10-05
- Inventor: Toshihiro Morisawa , Andrew C. Walker , Yeak-Chong Wong
- Applicant: Toshihiro Morisawa , Andrew C. Walker , Yeak-Chong Wong
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Technologies Netherlands B.V.
- Current Assignee: Hitachi Global Technologies Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G06F17/10 ; G05B13/02

Abstract:
An advanced process control (APC) system. The APC system comprises a database for receiving process data from a measurement tool for a plurality of process runs and for storing the process data. A lambda tuner determines a tuned-lambda value corresponding to a process-capability-index value based on upper and lower process control limits and statistics derived from the process data. A process-run controller updates a recipe value based on the received process data and the tuned-lambda value.
Public/Granted literature
- US20090171638A1 Advanced-process-control system utilizing a lambda tuner Public/Granted day:2009-07-02
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