Invention Grant
US07811721B2 Mask for crystallizing silicon, apparatus having the mask and method of crystallizing with the mask 有权
用于结晶硅的掩模,具有掩模的装置和用掩模结晶的方法

Mask for crystallizing silicon, apparatus having the mask and method of crystallizing with the mask
Abstract:
A mask for crystallizing silicon includes a first, a second, and a third pattern part arranged in a longitudinal direction, each of the first, second, and third pattern parts including a plurality of unit blocks for transmitting and blocking a portion of light. At least two of the first, second and third pattern parts have a corresponding pattern to each other. Advantageously, scans using the aforementioned mask effectively remove a boundary on the silicon formed by the difference in the amount of laser beam irradiation received by the silicon, thereby improving electronic characteristics of the silicon.
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