Invention Grant
US07811721B2 Mask for crystallizing silicon, apparatus having the mask and method of crystallizing with the mask
有权
用于结晶硅的掩模,具有掩模的装置和用掩模结晶的方法
- Patent Title: Mask for crystallizing silicon, apparatus having the mask and method of crystallizing with the mask
- Patent Title (中): 用于结晶硅的掩模,具有掩模的装置和用掩模结晶的方法
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Application No.: US11639874Application Date: 2006-12-15
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Publication No.: US07811721B2Publication Date: 2010-10-12
- Inventor: Hyun-Dae Kim , Han-Na Jo
- Applicant: Hyun-Dae Kim , Han-Na Jo
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2005-0124634 20051216
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
A mask for crystallizing silicon includes a first, a second, and a third pattern part arranged in a longitudinal direction, each of the first, second, and third pattern parts including a plurality of unit blocks for transmitting and blocking a portion of light. At least two of the first, second and third pattern parts have a corresponding pattern to each other. Advantageously, scans using the aforementioned mask effectively remove a boundary on the silicon formed by the difference in the amount of laser beam irradiation received by the silicon, thereby improving electronic characteristics of the silicon.
Public/Granted literature
- US20070141482A1 Mask for crystallizing silicon, apparatus having the mask and method of crystallizing with the mask Public/Granted day:2007-06-21
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