Invention Grant
- Patent Title: Fabrication method of multi-domain vertical alignment pixel structure
- Patent Title (中): 多域垂直对齐像素结构的制作方法
-
Application No.: US12472378Application Date: 2009-05-27
-
Publication No.: US07811869B2Publication Date: 2010-10-12
- Inventor: Han-Chung Lai
- Applicant: Han-Chung Lai
- Applicant Address: TW Hsinchu
- Assignee: Au Optronics Corporation
- Current Assignee: Au Optronics Corporation
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW95136524A 20061002
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84

Abstract:
A fabrication method of a multi-domain vertical alignment pixel structure includes providing a substrate, forming a gate on the substrate, and forming an insulating layer on the substrate. A channel layer and a semiconductor layer are formed on the insulating layer. A source, a drain, and a capacitor-coupling electrode are formed. A passivation layer is formed to cover the source, the drain, a part of the channel layer, and a part of the semiconductor layer. A via hole is formed in the passivation layer to expose the drain, and a trench is formed in the passivation layer and the insulating layer. A lateral etched groove on the sidewall of the trench is formed to expose the side edge of the semiconductor layer. A first pixel electrode and a second pixel electrode are formed on the passivation layer at both sides of the trench, respectively.
Public/Granted literature
- US20090233404A1 FABRICATION METHOD OF MULTI-DOMAIN VERTICAL ALIGNMENT PIXEL STRUCTURE Public/Granted day:2009-09-17
Information query
IPC分类: