Invention Grant
- Patent Title: Dual work-function single gate stack
- Patent Title (中): 双功能单门堆叠
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Application No.: US12175528Application Date: 2008-07-18
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Publication No.: US07811875B2Publication Date: 2010-10-12
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: Brent A. Anderson , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb I.P. Law Firm, LLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
Disclosed is a complementary CMOS device having a first FET with sidewall channels and a second FET with a planar channel. The first FET can be a p-FET and the second FET can be an n-FET or vice versa. The conductor used to form the gate electrodes of the different type FETs is different and is pre-selected to optimize performance. For example, a p-FET gate electrode material can have a work function near the valence band and an n-FET gate electrode material can have a work function near the conduction band. The first gate electrodes of the first FET are located adjacent to the sidewall channels and the second gate electrode of the second FET is located above the planar channel. However, the device structure is unique in that the second gate electrode extends laterally above the first FET and is electrically coupled to the first gate electrodes.
Public/Granted literature
- US20080299711A1 DUAL WORK-FUNCTION SINGLE GATE STACK Public/Granted day:2008-12-04
Information query
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