Invention Grant
US07812336B2 Levitating substrate being charged by a non-volatile device and powered by a charged capacitor or bonding wire 有权
悬浮底物由非挥发性装置充电并由带电电容器或接合线供电

  • Patent Title: Levitating substrate being charged by a non-volatile device and powered by a charged capacitor or bonding wire
  • Patent Title (中): 悬浮底物由非挥发性装置充电并由带电电容器或接合线供电
  • Application No.: US11953008
    Application Date: 2007-12-07
  • Publication No.: US07812336B2
    Publication Date: 2010-10-12
  • Inventor: Thaddeus John Gabara
  • Applicant: Thaddeus John Gabara
  • Applicant Address: US NJ Murray Hill
  • Assignee: Metamems Corp.
  • Current Assignee: Metamems Corp.
  • Current Assignee Address: US NJ Murray Hill
  • Agent Thaddeus Gabara
  • Main IPC: H01L29/06
  • IPC: H01L29/06
Levitating substrate being charged by a non-volatile device and powered by a charged capacitor or bonding wire
Abstract:
At least one non-volatile device is coupled to a first Coulomb island. The floating gates of these non-volatile devices are connected to the island and can charge the Coulomb islands. One device can charge the island positively while a second device can be used to charge the island negatively. The Coulomb island can have a small probe opening where a charge can be introduced by using mechanical means such as an external probe or a MEMS switch. A fully charged capacitor formed in a first substrate can provide additional energy to a levitated substrate if the first substrate is connected to the levitated substrate. Bonding wires can be attached to a substrate that is attached to a mother substrate. Then, Coulomb forces can levitate the substrate from the mother substrate and the bonding wires can provide a source of power to the levitated substrate.
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