Invention Grant
- Patent Title: Levitating substrate being charged by a non-volatile device and powered by a charged capacitor or bonding wire
- Patent Title (中): 悬浮底物由非挥发性装置充电并由带电电容器或接合线供电
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Application No.: US11953008Application Date: 2007-12-07
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Publication No.: US07812336B2Publication Date: 2010-10-12
- Inventor: Thaddeus John Gabara
- Applicant: Thaddeus John Gabara
- Applicant Address: US NJ Murray Hill
- Assignee: Metamems Corp.
- Current Assignee: Metamems Corp.
- Current Assignee Address: US NJ Murray Hill
- Agent Thaddeus Gabara
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
At least one non-volatile device is coupled to a first Coulomb island. The floating gates of these non-volatile devices are connected to the island and can charge the Coulomb islands. One device can charge the island positively while a second device can be used to charge the island negatively. The Coulomb island can have a small probe opening where a charge can be introduced by using mechanical means such as an external probe or a MEMS switch. A fully charged capacitor formed in a first substrate can provide additional energy to a levitated substrate if the first substrate is connected to the levitated substrate. Bonding wires can be attached to a substrate that is attached to a mother substrate. Then, Coulomb forces can levitate the substrate from the mother substrate and the bonding wires can provide a source of power to the levitated substrate.
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