Invention Grant
- Patent Title: Suspended-gate MOS transistor with non-volatile operation
- Patent Title (中): 具有非易失性操作的悬挂栅极MOS晶体管
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Application No.: US12168417Application Date: 2008-07-07
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Publication No.: US07812410B2Publication Date: 2010-10-12
- Inventor: Michael Collonge , Maud Vinet , Olivier Thomas
- Applicant: Michael Collonge , Maud Vinet , Olivier Thomas
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McCelland, Maier & Neustadt, L.L.P.
- Priority: FR0756347 20070709
- Main IPC: H01L27/20
- IPC: H01L27/20 ; H01L41/04 ; H01L41/083

Abstract:
A microelectronic device, including at least one transistor including: on a substrate, a semiconductor zone with a channel zone covered with a gate dielectric zone, a mobile gate, suspended above the gate dielectric zone and separated from the gate dielectric zone by an empty space, which the gate is located at an adjustable distance from the gate dielectric zone, and a piezoelectric actuation device including a stack formed by at least one layer of piezoelectric material resting on a first biasing electrode, and a second biasing electrode resting on the piezoelectric material layer, wherein the gate is attached to the first biasing electrode and is in contact with the first biasing electrode, and the piezoelectric actuation device is configured to move the gate with respect to the channel zone.
Public/Granted literature
- US20090014769A1 SUSPENDED-GATE MOS TRANSISTOR WITH NON-VOLATILE OPERATION Public/Granted day:2009-01-15
Information query
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