Invention Grant
- Patent Title: Piezoelectric microspeaker using microelectromechanical systems and method of manufacturing the same
- Patent Title (中): 使用微机电系统的压电式微型扬声器及其制造方法
-
Application No.: US12240138Application Date: 2008-09-29
-
Publication No.: US07812505B2Publication Date: 2010-10-12
- Inventor: Sang Kyun Lee , Sung Q Lee , Hye Jin Kim , Jae Woo Lee , Kang Ho Park , Jong Dae Kim
- Applicant: Sang Kyun Lee , Sung Q Lee , Hye Jin Kim , Jae Woo Lee , Kang Ho Park , Jong Dae Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Main IPC: H01L41/08
- IPC: H01L41/08 ; C03C15/00
Abstract:
A piezoelectric microspeaker using microelectromechanical systems (MEMS) and a method of manufacturing the same are provided. The piezoelectric microspeaker includes a piezoelectric layer disposed on an elastic thin layer, and a resonance change unit patterned on one of a bottom surface of the elastic thin layer and a top surface of the piezoelectric layer.
Public/Granted literature
- US20090146527A1 PIEZOELECTRIC MICROSPEAKER USING MICROELECTROMECHANICAL SYSTEMS AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-06-11
Information query
IPC分类:
