Invention Grant
- Patent Title: Piezoelectric/electrostrictive membrane type measuring device
- Patent Title (中): 压电/电致伸缩膜式测量装置
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Application No.: US12331694Application Date: 2008-12-10
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Publication No.: US07812506B2Publication Date: 2010-10-12
- Inventor: Hideki Shimizu , Takao Ohnishi , Tomohiro Yamada
- Applicant: Hideki Shimizu , Takao Ohnishi , Tomohiro Yamada
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Priority: JP2006-184061 20060704; JP2006-221129 20060814; JP2007-065922 20070314
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A piezoelectric/electrostrictive membrane type sensor is provided with a ceramic base body and a piezoelectric/electrostrictive element. The ceramic base body includes a thin diaphragm portion, a thick portion and a cavity formed by the portions. The piezoelectric/electrostrictive element is arranged on the ceramic base body and also includes a piezoelectric/electrostrictive body, and an upper electrode and a lower electrode sandwiching the piezoelectric/electrostrictive body. Further, the piezoelectric/electrostrictive body contains an alkaline metal or an alkaline earth metal, with the upper electrode and the lower electrode containing gold or platinum. When there is a change in the atmosphere at a place where the sensor is used, the sensor copes with such change and at least prevents the continuation of a low-quality measurement.
Public/Granted literature
- US20090095072A1 PIEZOELECTRIC/ELECTROSTRICTIVE MEMBRANE TYPE SENSOR Public/Granted day:2009-04-16
Information query
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